Software for data storage and statistical analysis in MMIC measurement automation system INDESYS-MS

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Authors: Salnikov A. S., Dobush I. M., Karataev E. P.

Annotation: The software for data storage and analysis in MMIC measurement automation system INDESYS-MS is described. Special database is designed for organizing MMIC measurement results storage. The software MS Database provides interaction between automation system INDESYS-MS and database. The software Statistics performs statistical analysis of stored measurement results. It uses such statistical tools as a histogram, visualization of controlled parameter distribution along the wafer, and control Shewhart charts.

Keywords: mmic, measurement, software, database, statistical analysis