Automation of on-wafer measurements of S-parameters and current-voltage curves with Indesys-MS software environment

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Authors: Salnikov A. S., Dobush I. M., Koshevoy S. E., Sheerman F. I.

Annotation: The paper describes the software development for automation of on-wafer microwave measurements based on Indesys-MS program environment. The measurement scripts for S-parameters and I-V curves of transistor are presented. Hard- and software parts of a specialized set-up for on-wafer microwave measurements are described.

Keywords: on-wafer microwave measurements, automation, s-parameters, current-voltage curves