Generation of ion beams in a vacuum arc ion source with a two-component cathode

Authors: Frolova V. P., Prokopenko N. A., Kiziridi P. P.

Annotation: Ion sources are widely used for beam modification of the various surfaces properties by the method of «metallurgical» ion implantation. Use of metallic ions of multicomponent cathodes in vacuum arc sources allows to obtain complex composition beams, which expands their technological capabilities. This paper presents studies of a wide-aperture ion beam parameters generated in a vacuum arc ion source with a twocomponent cathode of a copper-chromium composite. It is shown that charge states distribution of copper and chromium ions in a beam depends on their ratio in the cathode material, and the fractions of these ions in the beam correspond to their atomic content in the cathode.

Keywords: vacuum arc ion source, multicomponent ion beams, copper-chromium composite