Investigation of «Open», «Open-Short», «Open-Short-Thru» de-embedding methods for on-wafer measurements of S-parameters of MMIC Elements

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Authors: Dobush I. M.

Annotation: This work presents general introduction and features of the de-embedding concept for on-wafer measurements of S-parameters of MMIC Elements. This paper shows «Open», «Open-Short» and «Open-Short-Thru» deembedding equations. As an example, the de-embedding up to 40 GHz of MMIC thin-film resistor is demonstrated. These methods are implemented in the DataViewer software tool.

Keywords: on-wafer measurements, s-parameters, de-embedding, open, open-short, open-short-thru, characterization, mmic