Abstract: We developed a system for measuring nano scale movements of micro and macro objects based on an adaptive holographic interferometer. The measuring system based on an adaptive interferometer allows the stable registration and measuring movements of micro-and macro-objects in the range of 1.7 to 266 nm at speeds of tens of nm / s to a few μm / s.
Keywords: adaptive holographic interferometer, nanometrology, photorefractive crystal, dynamic hologram, nano scale movements
Authors and copyright holders:
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For citation:
Romashko R. V., Efimov T. A., Asalhanova M. A. The holographic measurement system of nano scale movements of micro and macro objects. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2012, no. 2(26), – p. 2. pp. 67–70.
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