Abstract: We investigate the electrophysical properties of silicon dioxide porous films, received by means of magnetron dispersion of a compound target.
Keywords: silicon dioxide, carbon, dioxide of silicon modified by carbon, magnetron
Authors and copyright holders:
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For citation:
Saharov Yu. V., Troyan P. E. Research of silicon dioxide porous films. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2011, no. 2(24), – p. 2. pp. 77–80.
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