Proceedings of TUSUR University / Archive / Issue of Journal № 2, 1 part [22], 2010 / Sensor gaseous hydrocarbon-based porous film SiO 2 +C nanometer thickness

Sensor gaseous hydrocarbon-based porous film SiO 2 +C nanometer thickness

Authors: Usov S. P., Troyan P. E., Saharov Yu. V.

Annotation: Gas-sensitive properties of porous silicon dioxide obtained by sputtering a composite target of siliconcarbon are considered

Keywords: carbon, porous films, silicon dioxide, sensor

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