Abstract: Gas-sensitive properties of porous silicon dioxide obtained by sputtering a composite target of siliconcarbon are considered
Keywords: carbon, porous films, silicon dioxide, sensor
Authors and copyright holders:
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For citation:
Usov S. P., Troyan P. E., Saharov Yu. V. Sensor gaseous hydrocarbon-based porous film SiO 2 +C nanometer thickness. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2010, no. 2(22), – p. 1. pp. 187–190.
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