Microwave probes for measuring the characteristics of planar elements of integrated circuits

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Authors: Ladur A. A.

Annotation: High-frequency probes are a functional-difficult part of system of measurement on a wafer. Probes create transition from a measuring tract to a microcircuit. The work purpose consisted in creation of microwave probes. The probe design is presented on a figure 1. Calculation electromagnetic is presented in figure 2.

Keywords: microwave, probe, probe station, measure, line