Abstract: High-frequency probes are a functional-difficult part of system of measurement on a wafer. Probes create transition from a measuring tract to a microcircuit. The work purpose consisted in creation of microwave probes. The probe design is presented on a figure 1. Calculation electromagnetic is presented in figure 2.
Keywords: microwave, probe, probe station, measure, line
Authors and copyright holders:
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For citation:
Ladur A. A. Microwave probes for measuring the characteristics of planar elements of integrated circuits. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2010, no. 2(22), – p. 1. pp. 178–179.
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