Transparent conductive coatings with controlled values of light transmittance and surface resistance

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Authors: Troyan P. E., Saharov Yu. V., Zhidik Yu. S.

Annotation: The deposition technology of ITO films was developed. This films have controlled values of surface resistivity of 10-20 Ohm / □ to 2-4 MOhm / □ and transmittance of radiation in the visible range from 5% to 90%. The minimum value of surface resistance is world-class. Possible applications of such coatings were observed.

Keywords: ito (indium tin oxide), magnetron sputtering, thermal annealing, transparent electrode, transparent heating element, protective coating