Abstract: The deposition technology of ITO films was developed. This films have controlled values of surface resistivity of 10-20 Ohm / □ to 2-4 MOhm / □ and transmittance of radiation in the visible range from 5% to 90%. The minimum value of surface resistance is world-class. Possible applications of such coatings were observed.
Keywords: ito (indium tin oxide), magnetron sputtering, thermal annealing, transparent electrode, transparent heating element, protective coating
For citation:
Troyan P. E., Saharov Yu. V., Zhidik Yu. S. Transparent conductive coatings with controlled values of light transmittance and surface resistance. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2014, no. 1(31), pp. 99–102.
Authors and copyright holders:
- Troyan P. E. , Tomsk State University of Control Systems and Radioelectronics (Tomsk, Russia)
- Saharov Yu. V.
- Zhidik Yu. S.
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