Plasma mass-charge composition measurements generated in the discharge system with electron injection and additional sputtering electrode

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Authors: Tyunkov A. V., Yushkov Yu. G.

Annotation: Based on the time of flight technique mass - charge composition of the plasma generated in the discharge system with electron injection and additional sprayed electrode are investigated. This electrode configuration of the discharge unit enables the creation of composite coatings for various applications. It is shown that the metal ion contribution in the bulk plasma does not exceed a few percent.

Keywords: low pressure discharge, sectioned sputtering electrode, electron injection and tof mass- spectrometer