Manufacture of InP-based electro-optical modulators for FOCL and automated visual inspection of their surface for defects

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Authors: Shurygin Yu. A., Ishutkin S. V., Shiryaev B. V., Zhidik Yu. S.

Annotation: Electro-optical modulators are key elements in the construction of fiber-optic communication lines. In this work, the authors developed a technology for manufacturing Mach-Zender electro-optical modulators based on InP. The developed technology was tested while manufacturing test samples of electro-optical modulators. The defects on the surface of the samples were visually inspected in an automated mode using the algorithm developed by the authors.

Keywords: optoelectronics, electro-optical modulator, indium phosphide, reactive ion etching, hcb, pin diode, visual inspection, defect detection