Abstract: An experimental measurement system based on adaptive interferometer measurement of the mass of micro-and nano-objects is suggested. The sensitive element of the system is a micro oscillator. We present experimental result of applying interferometry technique for measuring picograms of adsorbed mass on micromechanical resonators. In experimental testing of measuring system the change in mass attached to a micro-oscillator nanoobjects was 420×10¯¹² g, the mass detection threshold was 8,5 × 10¯¹² g.
Keywords: adaptive interferometer, determine mass
Authors and copyright holders:
—
For citation:
Romashko R. V., Efimov T. A. Micromechanical mass sensor with holographic interferometer. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2012, no. 2(26), – p. 2. pp. 75–77.
Last issue
-2025-1.jpg)
Editorial office address
Executive Secretary of the Editor’s Office
Editor’s Office: 40 Lenina Prospect, Tomsk, 634050, Russia
Phone / Fax: + 7 (3822) 701-582
Viktor N. Maslennikov
Executive Secretary of the Editor’s Office
Editor’s Office: 40 Lenina Prospect, Tomsk, 634050, Russia
Phone / Fax: + 7 (3822) 51-21-21 / 51-43-02
Subscription for updates
