Micromechanical mass sensor with holographic interferometer

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Authors: Romashko R. V., Efimov T. A.

Annotation: An experimental measurement system based on adaptive interferometer measurement of the mass of micro-and nano-objects is suggested. The sensitive element of the system is a micro oscillator. We present experimental result of applying interferometry technique for measuring picograms of adsorbed mass on micromechanical resonators. In experimental testing of measuring system the change in mass attached to a micro-oscillator nanoobjects was 420×10¯¹² g, the mass detection threshold was 8,5 × 10¯¹² g.

Keywords: adaptive interferometer, determine mass