Abstract: The means for control of ion flux sources by changing the plasma flow form, ion charge, pulses of pressure and voltage are considered.
Keywords: discharge, ion source, plasma flow
Authors and copyright holders:
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For citation:
Orlikov L. N., Orlikov N. L., Arestov S. I., Shandarov S. M. Controlled sources of ion flux. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2010, no. 2(22), – p. 2. pp. 93–96.
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