Formation of functional oxide composite coatings based on a discharge system with electron injection

Abstract: The principal possibility of the functional oxide composite coatings synthesis based on discharge system with electron injection and segmented spray electrode is shown. This approach has some fundamental advantages compared to magnetron and vacuum arc devices which are traditionally used for these purposes. Using Ti-Zn-O structures there have been obtained the coating with substantial hydrophobic properties. ZnO coating: Al, while maintaining optical transparency, provides a significant electrical conductivity.

Keywords: gas-metal plasma generator, segmented spray electrode, electron injection, functional coatings

For citation:
Vizir A. V., Savkin K. P., Tyunkov A. V., Shandrikov M. V., Yushkov G. Yu. Formation of functional oxide composite coatings based on a discharge system with electron injection. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2011, no. 1(23), pp. 83–88.