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Proceedings of TUSUR University / Archive / Issue of Journal № 1, 2 part [21], 2010 / The research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing

The research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing

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Authors: Savruk E. V., Smirnov S. V.

Annotation: There are the results of the research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing.

Keywords: aluminum oxide ceramics, laser processing, electron processing, microhardness, fracture toughness coefficient

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Доклады ТУСУР – выпуск № 2, t. 27 2024г.
Proceedings of TUSUR University
№ 2, t. 27, 2024
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