Abstract: There are the results of the research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing.
Keywords: aluminum oxide ceramics, laser processing, electron processing, microhardness, fracture toughness coefficient
Authors and copyright holders:
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For citation:
Savruk E. V., Smirnov S. V. The research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing. Doklady Tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 2010, no. 1(21), – p. 2. pp. 123–127.
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