The research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing

Download article in PDF format

Authors: Savruk E. V., Smirnov S. V.

Annotation: There are the results of the research on surface structure of aluminum oxide ceramics substrates for microwave hybrid IC’s after electron and laser processing.

Keywords: aluminum oxide ceramics, laser processing, electron processing, microhardness, fracture toughness coefficient

Viktor N. Maslennikov

Executive Secretary of the Editor’s Office

 Editor’s Office: 40 Lenina Prospect, Tomsk, 634050, Russia

  Phone / Fax: + 7 (3822) 51-21-21 / 51-43-02

  vnmas@tusur.ru

Subscription for updates