Experience in the development and application of fore-vacuum plasma electron sources

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Authors: Burdovitsin V. A., Bakeev I. Yu., Zenin A. A., Zolotuhin D. B., Kazakov A. V., Klimov A. S., Medovnik A. V., Oks E. M., Tyunkov A. V.

Annotation: Experimental results on research and possible application of electron beams created by plasma sources in fore-vacuum are presented. The sources forming the continuous and pulse beams of various configurations are considered: focused, cy- lindrical, ribbon. The presence of gas in a vacuum chamber promotes formation of beam plasma which provides charge leakage from the isolated targets and does possible electron beam processing of dielectrics. Experimentally confirmed possible application of electron beams are shown: drilling and dimensional processing of ceramics, evaporation of ceramics and coatings deposition, sintering of ceramic powder, modifi- cation of ceramic and polymer surfaces.

Keywords: plasma sources, development, electron beams, application, fore-vacuum, dielectric treatment, beam plasma generation